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Electron Microscope Analyzers

QUANTAX EDS for SEM

XFlash®7 - The New EDS Detector Series

The Right Angle for Better Analysis

Fast. Precise. Reliable.

Faits marquants

1,000,000
cps
Real analytical throughput up to 1,000,000 cps
Achieve unmatched analysis speed
> 2,200
Element lines
Quantify the most complex data using the most comprehensive atomic database incl. K, L, M and N lines
> 1.1
sr
Largest solid angle for X-ray collection
Maximize your sample throughput with optimum geometry for most efficient collection of the generated X-rays

Energy-Dispersive Spectrometry for SEM, FIB-SEM and EPMA

  • Bruker's latest generation of QUANTAX EDS features the XFlash®7 detector series, which provides thelargest solid anglefor X-ray collection (also called collection angle) and thehighest throughput.
  • The XFlash®7 continues to set standards inperformance and functionalityin energy-dispersive spectrometry for the Scanning Electron Microscope (SEM), Focused Ion Beam (FIB-SEM) and Electron Probe Micro Analyzer (EPMA).
  • The XFlash®7 detector family also offers optimized solutions for EDS analysis of electron transparent specimens in TEM and SEM, as well as the unique XFlash®FlatQUAD, a detector made to answer your questions on challenging samples.
  • Slim-line technology, large collection angle design, latest generation pulse processing,maximized system uptimethrough predictive maintenance.
  • Highest spectral performanceobtained with best energy resolution.
  • Increased accuracy of resultsby sophisticated quantification algorithms and a unique combination of standardless and standard-based methods.
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Avantages

Make Your Elemental Analysis more Efficient!

  • Gain very precise results faster with individually optimized EDS systems. It ensures unmatched speed and precision.
  • Shorten measurement time with maximized throughput, enabling mapping and quantification at all settings with no limitation of data size.
  • Analyze challenging samples now, thanks to the most efficient geometric collection of generated X-rays.
  • Benefit from accurate and reliable quantification results with optimized geometry minimizing background and avoiding absorption.
  • Detect small quantities with better detection limit, lower background and less absorption.
  • One for all - seamless integration of EDS, WDS, EBSD, and Micro-XRF in the comprehensiveESPRITanalysis platform for any SEM, FIB-SEM and EPMA.

Applications

What is your Analytical Challenge?

生活化学映射of solder region

Live Elemental Mapping of Sn–Cu Solder Region in Al-Si Alloy

Live elemental mapping using ESPRIT LiveMap enables large area scanning of the sample surface for quick ROI identification to perform further analysis with EDS or other techniques
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EDS map of a failed welding seam

High Throughput Element Mapping of Zr-steel Welding Seam

Welding of zirconium with stainless steel is a challenging procedure which involves various phase formations and element diffusion off the heat-affected zone (HAZ). High throughput, i.e., high-speed EDS element distribution mapping using the new XFlash detectors quickly provides post-welding information about the local structure and potential failures.
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composite EDS map

Fast Elemental Mapping of Si and W Wafer Etching Residues

The new generation of XFlash®detectors make mapping at very high input count rates (ICR) possible. This example showcases the XFlash®detectors’ mapping capabilities of an element combination with overlapping peaks (Si and W) at very high count rates.
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Fields of Application of Elemental Analysis on SEM

Materials Science
EDS spectrum of HfB2 acquired at 5 kV; Inset picture shows magnified spectra in the 100 - 250 eV region

Low-kV Quantification of Refractory Borides for High Temperature Applications

Ultra-high temperature (UHT) boride ceramics are a class of refractory materials that are made for extreme environments.
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Bismuth segregation in AgPbTeBi Thermoelectric materials

Resolving Bismuth Enriched Grain Boundaries in Thermoelectric Materials

Thermoelectric materials have versatile applications from energy generation to solid state cooling.
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EDS map and SE image of coating layers on tungsten carbide cutting tools

TiCN Hard Coatings for Tungsten Carbide Cutting Tools

Functional thin and thick layers are technologically important since they enhance or change the surface properties of any material. However, the two-dimensional nature of these films and buried interfaces poses challenges in reliable analysis of these class of materials.
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Nanomaterials
Silicon nanoparticles with carbon in red and Silicon in green

Ultra-high Resolution Elemental Mapping of Si-core-C-shell Silicon Nanoparticles

Mapping the elemental distribution of Silicon-core–carbon-shell nanoparticles is possible with Scanning Electron Microscope using Bruker's unique EDS FlatQUAD detector.
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Mineralogy
Mocs historic meteorite: Composite net intensity map showing sulfur and lead deposides in the cracks of the meteor

High Resolution X-ray Elemental Mapping of a Meteorite Specimen

Elemental distribution mapping with Scanning Electron Microscope does not require sample preparation when using Bruker's unique XFlash FlatQUAD EDS detector. Here we present results acquired on a meterorite specimen, for which any kind of sample preparation is forbidden.
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SE-image of a ternary alloy with rough sample topography and certified concentration values

EDS Quantification on Materials with Rough Topography

For reliable EDS quantification, the accurate knowledge of the sample and the detector geometry is imperative.
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X-ray elemental maps of a mantle peridotite sample

Efficient X-ray Mapping of an Entire Geological Thin Section by SEM-based EDS

Elemental distribution of a whole mineralogical thin section can be achieved in few minutes only, with EDS mapping by controlling the beam and stage of scanning electron microscopes.
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Webinaires

Webinars

Distribution of Ni and Cr in Ni-based single crystal super alloy acquired at high magnifications in SEM
ON DEMAND SESSION - 37 MINUTES

Achieving Sub-10 nm EDS Spatial Resolution on Bulk Specimens in SEM

In this webinar, we demonstrate how sub-10 nm EDS-spatial resolution can be achieved using a low and high kV. Examples given include bulk semiconductor and aerospace materials with challenging element combinations.
Elemental mapping ( chromium, iron and zirconium) of failed welding seam
ON-DEMAND SESSION - 41 MINUTES

Improving Efficiency with the XFlash®7 EDS Detector Family

In this webinar where we present the benefits and increases in effiency that the new XFlash®7 detector series delivers. We also introduce the workflow of Esprit LiveMap which allows users to carry out real-time chemical imaging.
XFlash 7 EDS detector series element analysis EDS
ON-DEMAND SESSION - 35 MINUTES

Introducing the XFlash®7 EDS Detector

In this webinar we present the benefits of this new detector series and discuss specifics of microscope detector geometries. We also show examples of data acquisition and analysis across different fields of application.

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