DIFFRAC. XRR

DIFFRAC. XRR has two different analysis methods, can best meet the user requirements:

• Fast Fourier transform (FFT) method, just click the mouse, then by X-ray reflection (XRR curve quickly estimate the film thickness.
• Through fitting samples based on the theory of the dynamic scattering model, a detailed analysis of X ray reflection (XRR) measurements.

DIFFRAC. XRR aims to maximize the user in the process of the whole analysis efficiency: the model to generate a report sample results:

• The sample of the flexible modeling, including free fitting based on the parameters of the formula and variables.
• Comprehensive and extensible material and sample database.
• Senior automation function and the working process, including macro recording and perform step by step.
• Automatic analysis and display a series of reflectance measurements.
• Wafer surface scan data assessment, including customizable contour map and statistical analysis.
• Strong and broad with the function of the template report generator.

When analyzing the task need to extract the film thickness, DIFFRAC. XRR software set the benchmark: just click the mouse, estimating tools by fast Fourier transform to evaluate film thickness, and according to the results directly to the corresponding XRR measurements in the map.

DIFFRAC. XRR software provides a comprehensive, extensible material database, it consists of amorphous and crystalline material and mixed crystal to quaternary compounds.In addition, the database also provides the structure factor or HKL pattern and X ray features (such as absorption and penetration depth, refractive index, polarization) calculation.For convenience to create a new database entry, can be directly imported. Cif files and. STR file.

DIFFRAC. XRR software comes with a powerful database sample.

Can create and store the sample of the complex structure, and the load directly to the current analysis of the project.This greatly improve the efficiency of daily work.

And measurement software DIFFRAC. SUITE share the sample database, also can be more effectively planning experiments, which greatly support DIFFRAC. SUITE software platform plan, measurement and analysis of the concept.

Conventional analysis of the X-ray reflectivity has never been so simple: DIFFRAC. XRR software can record macro instruction and in a single operation or execute them step by step mode.

Workflow designer to create workflow provides an intuitive interface, can guide the user through the data analysis, results from import data to generate a report, can even run it completely automatic.

Wafer or surface scanning allows to determine the lateral uniformity of the sample.

DIFFRAC. XRR software has full wafer analysis function: each refinement of sample parameters can be displayed as a contour line, can display the parameters of statistical information in detail, and along the surface of the cross section allows to check the partial sample characteristics in detail.