Material of EDS quantitative rough terrain

For reliable EDS quantitative, samples must be accurate understanding and detector's geometry.But for the sample of the rough surface, it is difficult for us to know the gain spectra of sample geometry point corresponding areas.Ascension EDS quantitative accuracy of a method is rotating sample for multiple spectra.This fuzzy sample quantitative, the influence of rough surface to make the results more close to the concentration of the stoichiometric ratio.

Figure 1 shows A rough SE images of ternary alloy on the surface of the sample, the concentration of the alloy material known (element A = 33.4%, B = 41.3% and the quality percentage of C = 25.3%).In order to evaluate the composition of the sample, we five points on the surface of the sample collected spectra (figure 1 a).After the sample rotated 180 °, the other five point collection spectra (almost the same as the previous position) (FIG. 1 b).Material composition of the results of average for the element A = 33.5%, 40.8% and C = B = 25.7%, these values are very close to theoretical density.Measurement is the most convenient method in the rough surface of the sample using brooke's uniqueXFlash^®FlatQUAD spectrometer.