Dimension Edge PSS atomic force microscope
Bright spot
Dimension EDGE PSS
Brooke's Dimension Edge ™ PSS atomic force microscope and AutoMET ™ software is the most ideal LED substrate and epitaxial wafer manufacturer of nanometer measurement and test system.As an extension of the Dimension EDGE AFM platform, EDGE PSS is a blend of Dimension AFM system known as scanning technology and ultra-high resolution, at the same time, it provides a measurement of the semiconductor substrate production solution.
The characteristics of
The highest resolution analysis of PSS
As the sapphire substrate structure PSS spacing reaching 2 microns, the traditional confocal technology lost provide valuable technology needed for the measurement resolution.Dimension Edge PSS atomic force microscope（AFM） 拥有亚纳米分辨率和一次测量多达 9 个 2 英寸晶圆（或单个 4 或 6 英寸晶圆）的能力，能够解决测量中的高分辨、高效的需求，提供了PSS 制造过程所需要进行的大量检测数据。
In addition to specific PSS Dimension EDGE PSS built-in measuring function, the system also integrates brooke Dimension microscope series famous scanning technology, suitable for epitaxial roughness measurement with high resolution, low noise, including the tapping mode, contact models, such as phase measuring standard of AFM and AFM proprietary raise pattern.
Senior PSS measurement capability
- Height, width and spacing
- Sidewall Angle and characteristics of the contour
- Asymmetric recognition and measurement
- Pollution recognition
- Identification of turning and turning Angle
- Ceiling recognition
The industry's leading AutoMET software
Dimension Edge PSS system integrates specifically designed to meet the requirements of the LED manufacturing AutoMET software.The software has two kinds of different levels of operation mode:
Level of the operator: simple user interface, step by step guide users through probe change, laser alignment, most cerebral sci-film probe and confirm probe installation steps.A key to complete as many as nine wafer "" pass/fail", "the classification of the test results automatically output,
Engineer level, protected by a password of user interface, engineers can access all the key parameters of AFM.In this mode, process engineer can easily set all of the required "" pass/fail" test "standard.
Dimension Edge PSS by easy way of laser alignment, automatically generate reports to improve the operability of the system, and the users feel the best ever AFM user experience.
