Automated nanometer measurement used for industrial research and development of AFM
Bright spot
Dimension FastScan Pro: production rapid scanning atomic force microscope
Dimension FastScan Pro provides the modern industry fairly rapid scanning and rich performance measurement.The system supports automatic or semi-automatic measurement, at the same time with ease, and meet the implementation of quality control, quality assurance and low cost requirements of fault analysis.
unique
AFM production technology
Support the excellent surface characterization.
unparalleled
Service and support
By operating efficiency to reduce costs.
automation
AFM scanner
Provides a measure of the reliable and seamless workflow.
FastScan Pro using open platform, large sample or samples as well as a variety of ease of use function, for QA, QC, and FA industrial department offers flexible high-performance nanoscale measurement.The system can be used in the semiconductor industry, hard disk, HB - LED industry 2 inches - to 12-inch wafer automatic measurement.It has increased the x, y direction of travel, can complete access 200 mm wafer area with a diameter of 200 mm or in multiple samples in multiple regions, and is equipped with a 300 mm wafer optional sample sets.The system also provides for topography, roughness and other measurement parameter analysis.With high-speed FastScan scanning head replacement and has 90 mu m scanning range Icon scanning head (for a larger scan and high resolution terrain performance).
Powerful automation software
AutoMET ™ software measurement process provides the operation is simple, rapid, automatic, and the quality control of key parameters.The software allows on multiple samples or a single large sample more automatic measurement.It also provides optical and AFM pattern recognition, probe tip centralized, after the blank wafers and graphical wafer testing, and dozens of nanometer scale the image position of the alignment accuracy.Comprehensive and simple measurement process writing advanced users in online and offline software applications with fast and effective.
Engineers can easily create measuring process, by name defined measurement location, and number of the measuring way and each location
The process window, showing that based on the distribution of the wafer, used for precise definition x-y position measurement.
Accurate control probe in the interaction between the samples
Dimension FastScan Pro has precise control probe in samples of interaction ability, suitable for various types of samples from soft polymer to very hard materials, thin films and electrical sample can be scanned.
Unique atomic force microscopy technology can control any of the van der Waals force between probe and sample.The accurate force control allows between probe and sample machine used in a wide range of sample types, from soft polymer, thin film and electrical samples to hard materials.It also provides the lowest force can be used in imaging, scanning probe life over hundreds and data collection.
application
application
Dimension FastScan Pro by illustrations
Due to probe in the oscillation damping effect, the use of the classic imaging mode is hard to imaging of deep grooves.Peak force model can scan to the bottom of the deep groove structure, in this example, the use of brooke standard probe to 65 nanometers, 50 nanometers wide line and grooves for imaging.
Semi-automatic 24/7 operation, use the Dimension AFM to describe 3 d design for process control.
The main characteristics of alkali - aluminum silicate plate has the characteristics of high strength and scratch resistance, thus unsustainable accurately measuring the nanoscale morphology.FastScan AFM and special brooke HPI probe combination of graphics instance: the first image (A) the surface roughness Rq = 0.99 nm, Ra = 0.79.Image number 615 (B) in figure A, rendering the same roughness.Rq = 0.99 nm, Ra = 0.79.Next to the figure is no. 1 and no. 615 digital zoom in the image of the scan, showed insignificant changes in morphology.
